Formation of WO3 by remote plasma assisted oxidation of tungsten thin films(Article)

Surface and Coatings Technology

Journal Article

W.a Kassem

M.a Tabbal

M.b Roumie

Publication

Year of publication: 2016

Identifiers

ISSN: 02578972

Locators

DOI: 10.1016/j.surfcoat.2016.09.046

Alternative Titles